SoLayTec introduces breakthrough techniques. Our distinctiveness is evident in using new technologies such as ‘spatial ALD’ and ‘motion of wafers by the double floating principle’. This enables the best possible passivation for all kind of c-Si solar cells . Furthermore, passivation can be done by a very thin layer at the lowest cost.
Layer thickness flexibility
Modular, Lab to Fab
Up to 4,800 wph
In a comparison of the two technologies, ALD offered an average gain of 0.2% higher efficiency for PERC compared to the MW-PECVD AIOx.
It’s known that the average uptime of MW-PECVD deposition technique is about 80-85%. The combination of InPassion ALD with SPECTRUM PECVD is about 95%.
Due to the fact that the ALD layer is only 5nm thick, and a standard PECVD layer is about 20nm, the saving is about factor 4.
Savings in TMA consumption along with higher efficiency and output result in a much higher margin for the customer.
If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC multi and mono for different customers in Asia on several occasions. A example is the...
If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC...Download
"ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on mono-Si and 0.6-0.8% efficiency on multi-Si. Also, the uniform thin AlOx layer grown by ALD is useful for...
"ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on...
"In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform and conformal, the ALD technique is a unique option."
"In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform...Download
Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."
Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."Download
Atomic layer deposited (ALD) AI203 films are not yet applied in the PV industry despite their excellent performance in the lab. A major challenge is the usage of expensive semiconductor (semicon) grade trimethylaluminium (TMA) as the AI precursor. The cost of ownership for ALD AI203 passivation can be significantly reduced if lower purity solar grade TMA is used. Earlier work bij Dingemans et...1907 Downloads
Roger Görtzen, SoLayTecDillenburgstraat 9G, 5652 AM Eindhoven, The Netherlands What will be the standard for Al2O3? At this moment there are a few options for deposition of Al2O3. Spatial ALD, Batch ALD and, of course, PECVD, currently the most common. This article cannot go into too much detail about every solution but the obvious question to ask is “what will be the standard for Al2O3 for...2800 Downloads
New products of Tempress and SoLayTec were revealed during the last two exhibitions. Especially for the next PERC2.0 expansions those products are...Read more
SoLayTec today announced the continuing positive trend of incoming orders. Four new solar customers around the globe have ordered the Atomic Layer...Read more
The new InPassion ALD user, which is one of the tier one players in China, will start multi cSi PERC development in its in-house R&D centre....Read more
Leuven (Belgium)—Jan. 15, 2015—Nano-electronics research center imec announced today that it has improved its large area n-type PERT...Read more
Germany based Hanwha Q CELLS in Thalheim starts to evaluate the SoLayTec InPassion® ALD “LAB to FAB solution”. This tool will be used for the...Read more
Tempress (a subsidiary of the Amtech Group) has acquired the SoLayTec shares previously owned by RENA GmbH as they will focus on its expertise in...Read more
US based Mission Solar Energy has ordered an InPassion ALD for its high efficiency n-type silicon bifacial solar cell line. With this order...Read more
In recent weeks SoLayTec has shipped a number of systems. These systems includes a repeat order for modules (approx. 60MW) for an Asian customer,...Read more
Nano-electronics research center imec, reported today a n-type PERT crystalline silicon (Si) solar cell fabricated on a large area wafer (15.6cm x...Read more
In January the combination of RENA and SoLayTec received an order for the turnkey InPERC technology. The customer will convert one of its...Read more
A tier one cell manufacturer has ordered a second RENA-SoLayTec machine to start producing PERC cells in their production base of mono-Si wafers in...Read more
Three years after starting SoLayTec, the company received its first international solar award. This award was presented during the EU PVSEC...Read more
Leuven (Belgium) – September 27, 2013At next week’s European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC, Paris), the Belgian...Read more
ISFH and SoLayTec have achieved a conversion efficiency of 20.1% applying a 5nm thin spatial ALD Al2O3 layer as rear passivation of industrial-type...Read more
- 18% efficiency on multi without selective emitter- InPassion ALD Al2O3 passivation as core technologyRENA’s Inline technology for Passivated...Read more
Cooperation between technology leaders will accelerate development of cost efficient solution for Large Area ALD in Thin Film PV & Display...Read more
Last year at the 27th PVSEC in Frankfurt, SoLayTec introduced the InPassion ALD (Atomic Layer Deposition) mass production machine for low cost...Read more
EUPVSEC 2012 (Frankfurt, Germany) – September 24, 2012At this week’s European Photovoltaic Solar Energy Conference and Exhibition (27th...Read more
Eindhoven, The Netherlands, June 25 2012 The Solar Energy Research Institute of Singapore (SERIS) has purchased a Process Development Tool (PDT)...Read more
Eindhoven, The Netherlands, March 21 2012ISFH in Germany has purchased a Process Development Tool from SoLayTec. ISFH will optimize the Al2O3...Read more
Eindhoven, The Netherlands, September 12, 2011- RENA is largest shareholder of SoLayTec- Atomic Layer Deposition for high efficiency solar cell...Read more
Eindhoven, The Netherlands, June 28, 2011Imec, Fraunhofer ISE and two Asian cell manufacturers have shown their trust in the ultrafast ALD...Read more
Eindhoven, The Netherlands, May 3, 2011 SoLayTec is genomineerd voor de WNF Cleantech Star 2011. Dit is een prijs voor het meest veelbelovende...Read more
The German wet processing equipment producer RENA GmbH and Brabant Development Agency (BOM) have invested in SoLayTec, a company incorporated by...Read more
Eindhoven, The Netherlands, February 14, 2011 The German wet processing equipment producer RENA GmbH and Brabant Development Agency (BOM) have...Read more