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  • SoLayTec, contributes to a better environment

  • SoLayTec, making solar panels more efficient

  • SoLayTec, best performance second generation module

  • SoLayTec, for the ultimate solar cell passivation

OUR PRODUCT

SoLayTec introduces breakthrough techniques. Our distinctiveness is evident in using new technologies such as ‘spatial ALD’ and ‘motion of wafers by the double floating principle’. This enables the best possible passivation for all kind of c-Si solar cells . Furthermore, passivation can be done by a very thin layer at the lowest cost.

Layer thickness flexibility
Modular, Lab to Fab
Up to 4,800 wph

Read more about our product

OUR ADVANTAGES COMPARED TO PECVD

Better efficiency

In a comparison of the two technologies, ALD offered an average gain of 0.2% higher efficiency for PERC compared to the MW-PECVD AIOx.

Higher uptime / output

It’s known that the average uptime of MW-PECVD deposition technique is about 80-85%. The combination of InPassion ALD with SPECTRUM PECVD is about 95%.

Less TMA usage

Due to the fact that the ALD layer is only 5nm thick, and a standard PECVD layer is about 20nm, the saving is about factor 4.

More margin

Savings in TMA consumption along with higher efficiency and output result in a much higher margin for the customer.

Read more about our advantages

OUR CASES

  • SoLayTec integration team

    If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC multi and mono for different customers in Asia on several occasions. A example is the...

    If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC...

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  • Jinko Solar, Fandang Jiang

    "ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on mono-Si and 0.6-0.8% efficiency on multi-Si. Also, the uniform thin AlOx layer grown...

    "ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on...

  • Imec Leuven, Jef Poortmans

    "In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform and conformal, the ALD technique is a unique option."

    "In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform...

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  • Hanwha, Frederieke Kersten

    Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."

    Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."

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More cases

Al2O3 APPLICATIONS

PERC, IBC, N-PERT

Seff DOWN TO

1 ~ 5 CM/SEC

MODULAR CONCEPT

4, 6 OR 8 MODULES

OUR PUBLICATIONS

  • Evaluation of Spatial ALD Al2O3 versus PECVD for rear surface passivation of multi cSi solar cells

    This article shows the evaluation results on industrial p-type mc-Si PERC cells using spatial atomic layer deposition for aluminum oxide from SoLayTec. By optimizing the process flow and integrating a post-deposition anneal into the SiNx capping process we achieve 0.15% higher cell efficiency compared to remote microwave plasma-enhanced chemical vapor deposition. If the FF were to be...

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    Evaluation of Spatial ALD Al2O3 versus PECVD for rear surface passivation of multi cSi solar cells
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    262 Downloads

  • Al2O3 Passivation for Copper Plated IBC Cells 15.6x15.6 cm2

    Today, the silicon solar cells with the highest efficiency are interdigitated back contact solar cells. At imec, the cell concept for 15.6x15.6 cm2 IBC cells relies on a rear design with multiple busbars and a Cu plated rear metallization. Previously, we reported efficiencies up to 21.9% by introducing Cu plated contacts. Further developments in the rear design to overcome FF and Jsc losses...

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    Al2O3 Passivation for Copper Plated IBC Cells 15.6x15.6 cm2
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    200 Downloads

  • Upgrade of an Industrial Al-BSF solar cell line into PERC using spatial ALD Al2O3

    In this paper, we report the results of an upgrade from an Al-BSF solar cell line to a PERC (passivated emitter and rear cell) solar cell line, based on p-type mono-crystalline silicon (mono c-Si) material. For the rear side Al2O3 passivation, an InPassion ALD system of SoLayTec was used. The PERC solar cell optimization has been done in three main steps: first we optimized the rear...

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    Upgrade of an Industrial Al-BSF solar cell line into PERC using spatial ALD Al2O3
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    163 Downloads

  • Bifacial n-PERT cells with Al2O3 and plated contacts for multi-wire interconnection

    In this paper we introduce bifacial n-type PERT cells (Bi-PERT) with ultra-thin (< 3 um) and narrow (< 20 um) Ni/Ag plated fingers on both the n+ and p+ side of the cell. This cell architecture is designed for multi-wire interconnection and has the potential to deliver low Cost of Ownership at module level (< 0.40 $/Wp), as it can profit from bifacial gain, a low cost metallization...

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    Bifacial n-PERT cells with Al2O3 and plated contacts for multi-wire interconnection
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    220 Downloads

  • Translating 2nd Generation InPassion ALD into significant financial gains

    The article is in both Chinese and English. Last December SoLayTec celebrated its 5th anniversary, and in the meantime has installed about twenty items of ALD equipment in the PV industry. We are happy to be the leading ALD supplier in this market. Unfortunately, while we are not yet number one in the market for Al2O3 passivation, we do expect to win further market share with our 2nd...

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    Translating 2nd Generation InPassion ALD into significant financial gains
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    461 Downloads

  • PERC is hot. So think smart

    It will not have escaped your attention that PERC is indeed setting the agenda right now. But to stay one step ahead, it’s worth ‘thinking smart, and choosing Spatial ALD’ argues SoLayTec’s Roger Görtzen in a typically passionate and well considered piece. "Published: PES magazine, edition 27 2015"

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    PERC is hot. So think smart
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    1792 Downloads

  • Large Area N-Type c-SI solar cells featuring rear emitter and efficiency beyond 21%

    We present large area n-type solar cells (n-PERT) featuring a rear-boron-diffused emitter passivated with a stack of ALD Al2O3 and PECVD SiOx. We present the advantages of such a device structure and we show that efficiencies of 22% are within reach in the near future even without resorting to a back-contacted configuration and/or contact passivation.

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    Large Area N-Type c-SI solar cells featuring rear emitter and efficiency beyond 21%
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    2654 Downloads

  • Implementation of an ALD Al2O3 PERC technology into multi and mono cSi

    In this paper, we present the InPERC technology implemented into a multi- and monocrystalline silicon (mc- and Cz-Si) solar cell production of major Asian cell manufacturers. Stable average efficiencies over 18% and 20% respectively were demonstrated. Best average efficiencies of 18.4% were achieved on mc-Si solar cells with a best cell efficiency of 18.8%. To reduce the cost of ownership (CoO)...

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    Implementation of an ALD Al2O3 PERC technology into multi and mono cSi
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    2289 Downloads

  • Spatial ALD of i-ZnO films for applications in the PV industry

    Intrinsic as well as doped zinc oxide (ZnO) thin films are used in the photovoltaic industry as transparent and conducting window layers. The most common deposition technique for ZnO is sputtering which is known to cause near-surface damage due to the exposure of the underlying material to highly energetic ions. Atomic layer deposition (ALD) is a low-damage deposition technique that offers...

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    Spatial ALD of i-ZnO films for applications in the PV industry
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    3282 Downloads

  • Influence boron emitter profile Voc and Jsc losses ion implanted n-type PERT with SoLayTec Al2O3

    Introduction: N-type PERT (passivated emitter and rear, totally doped) solar cells [1] with boron emitters have attracted recently significant research interest [2–6]. While the efficiencies reported so far for industrial n-type PERT cells are comparable to the respective values for as-processed p-type PERC (passivated emitter and rear cell) cells, the n-type base material does not suffer...

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    Influence boron emitter profile Voc and Jsc losses ion implanted n-type PERT with SoLayTec Al2O3
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    2878 Downloads

  • Industrial production of multicrystalline silicon solar cells with efficiencies above 18%

    ABSTRACT: In this paper, we present the InPERC technology implemented into a multicrystalline silicon (mc-Si) solar cell production of a major Chinese cell manufacturer. Stable average efficiencies over 18% were demonstrated. Best average efficiencies of 18.4% were achieved on mc-Si solar cells without selective emitter with a best cell efficiency of 18.8%. To reduce the cost of ownership (CoO)...

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    Industrial production of multicrystalline silicon solar cells with efficiencies above 18%
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    4568 Downloads

  • Silicon surface passivation Al2O3 films grown by atomic layer deposition using low-cost precursors

    Naomi Nandakumar, Fen Lin, Bas Dielissen, Floor Souren, Xavier Gay, Roger Gortzen, Shubham Duttagupta, Armin G. Aberle and Bram Hoex. ABSTRACT: A key concern for the integration of Al2O3 films deposited by atomic layer deposition (ALD) in the photovoltaic industry is its high cost of precursors. This cost can be reduced by replacing conventional semiconductorgrade trimethylaluminium (TMA) with...

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    Silicon surface passivation Al2O3 films grown by atomic layer deposition using low-cost precursors
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    3659 Downloads

  • Post-deposition thermal treatment of ALD Al2O3 for the passivation of P-type PERC solar cells

    Xavier Gay, Floor Souren, Bas Dielissen, Martin Bijker, Roger Gortzen, Damian Pysch, Katrin Weise, Bernd Sander, Ronald Sastrawan. ABSTRACT: Passivated Emitter and Rear Cell (PERC) solar cell concept is one of the most promising technology for increasing crystalline silicon solar cell efficiency as well as a technology at relatively low production costs compared to other advanced solar cell...

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    Post-deposition thermal treatment of ALD Al2O3 for the passivation of P-type PERC solar cells
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    3638 Downloads

  • Firing-stable and blister-free spatial ALD Al2O3/SiNx stack for industrial PERC solar cells

    F.M.M. Souren, B. Dielissen, X. Gay, R. Gortzen, X.L. Jiang, W.Z. Ban, W. Shan, R. Hoyer, X. Mao, X. Qu. ABSTRACT: We have studied the passivation effect of ALD Al2O3/SiNx stacks as a function of H2O concentration during atomic layer deposition (ALD), with and without post-deposition annealing. Firing-stable and blister-free ALD Al2O3/SiNx stacks with implied Voc values larger than 700 mV can...

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    Firing-stable and blister-free spatial ALD Al2O3/SiNx stack for industrial PERC solar cells
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    2933 Downloads

  • Integration of spatial ALD Aluminium Oxide for rear side passivation of p-TypePERC/PERL solar cells

    E. Cornagliotti, L. Tous, A. Uruena, A. Rothschild, R. Russell, V. Lu, S. Radosavjlevic, J. John, J. Toman, M. Aleman, F. Duerinckx, J. Poortmans, J. Szlufcik, B. Dielissen, F. Souren, X. Gay, R. Görtzen, B. Hallam. ABSTRACT: In this paper we present an overview of the integration of amorphous aluminum oxide (Al2O3) as rear side passivation layer for large area industrial PERC solar cells...

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    Integration of spatial ALD Aluminium Oxide for rear side passivation of p-TypePERC/PERL solar cells
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    3241 Downloads

  • Implementation of a multicrystalline ALD-Al2O3 PERC-technology into an industrial pilot production

    R. Sastrawan, D. Pysch, M. Bijker, F. Delahaye, B. Dielissen, W. Eipert, X. Gay, R. Görtzen, A. Hoffmann, B. Latzel, M. Lenes, X. Mao, S. Patzig+Klein, X.Qu, B. Sander, C. Schmitt, F. M. M. Souren, A. Träger, K. Weise, S. Yang and H. Nussbaumer In this paper, we present results of the implementation of the InPERC technology into an industrial pilot production of a major Chinese cell...

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    Implementation of a multicrystalline ALD-Al2O3 PERC-technology into an industrial pilot production
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    3928 Downloads

  • Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA

    Atomic layer deposited (ALD) AI203 films are not yet applied in the PV industry despite their excellent performance in the lab. A major challenge is the usage of expensive semiconductor (semicon) grade trimethylaluminium (TMA) as the AI precursor. The cost of ownership for ALD AI203 passivation can be significantly reduced if lower purity solar grade TMA is used. Earlier work bij Dingemans et...

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    Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA
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    1917 Downloads

  • The quaranteed cell efficiency increase, could be a fairy tale

    市场的形势依然不如期望，所以我们都必须努力使已经是谷底价格的太阳能光伏更具吸引力！设备供应商可透过引进能进一步提高效率并且合算的新设备来达到这个目的，同时我们也有义务让客户知道他们所得到的不会是一个童话故事。我不得不承认，一些设备供应商只告诉他们的客户不全的事实，然而他们为什么要这样做？我所能想到唯一的原因是他们想再次出售新机器 .

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    The quaranteed cell efficiency increase, could be a fairy tale
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    1975 Downloads

  • In anderhalf jaar van lab naar fab

    Door Alexander Pil (Mechatronica & machinebouw) Slechts achttien maanden gaf SolayTec zichzelf om zijn bestaande R&D -tool voor atoomlaagdepositie om te toveren tot een systeem dat in de smaak zou vallen bij veeleisende zonnecelfabrikanten. De TNO-spin-off slaagde daarin door deelontwikkelingen parallel te laten verlopen en de kritieke onderdelen fysiek na te bouwen en uitvoerig te...

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    In anderhalf jaar van lab naar fab
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    1649 Downloads

  • In pursuit of the super PERC cell

    Aude Rothschild, Richard Russell, Joachim John, Philip Pieters and Jef Poortmans/imec PERC cells: Imec reports on recent innovations in some of the key steps for fabricating PERC-type solar cells: a new metallization scheme, a promising ALD - AL2O3 -based passivation layer and the integration of very thin cells into a module. In all these improvements, imec goes beyond current Si PV boundaries...

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    In pursuit of the super PERC cell
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    1716 Downloads

  • Impact of the rear surface roughness on Industrial-Type PERC Solar Cells

    C.Kranz1, S. Wyczanowski1, S. Dorn1, K. Weise3, C. Klein3, K. Bothe1, T. Dullweber1, R. Brendel1,2 1 Institute for Solar Energy Research Hamelin (ISFH), Am Ohrberg 1, D-31860 Emmerthal, Germany 2 Department of Solar Energy, Institute of Solid-State Physics,Leibniz University of Hanover, Appelstrasse 2, D-30167 Hanover, Germany 3 RENA GmbH, Hans-Bunte-Strasse 19, D-79108 Freiburg, Germany...

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    Impact of the rear surface roughness on Industrial-Type PERC Solar Cells
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    11122 Downloads

  • How much rear side polishing is required?

    E. Cornagliotti 1, A Uruena1, J. Horzel1, J. John1, L. Tous1, D. Hendrickx1, V. Prajapati1, S. Singh1, R. Hoyer2, F. Delahaye 2, K. Weise2, D. Queisser2, H. Nussbaumer2 and J. Poortmans11 IMEC vzw., Kapeldreef 75, 3001 Leuven, Belgium2 RENA GmbH, Hohenweg 1, 78148 Gütenbach, Germany In this work we study the impact of chemical polishing on the performance of mono-crystalline PERC cells....

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    How much rear side polishing is required?
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    3258 Downloads

  • Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx

    Richter, Schuldis, Benick, Hermle, Glunz; Fraunhofer ISE, Souren, Gortzen; SoLayTec Al2O3 deposited by atomic layer deposition (ALD) is known to provide an excellent passivation on lowly- and highly-doped p-type silicon surfaces even after contact firing processes. Therefore, Al2O3 layers are of great interest for the passivation of the rear side of p-type solar cells as well as the...

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    Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx
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    3576 Downloads

  • Ultrafast ALD compared to other technologies

    Roger Görtzen, SoLayTecDillenburgstraat 9G, 5652 AM Eindhoven, The Netherlands What will be the standard for Al2O3? At this moment there are a few options for deposition of Al2O3. Spatial ALD, Batch ALD and, of course, PECVD, currently the most common. This article cannot go into too much detail about every solution but the obvious question to ask is “what will be the standard for Al2O3 for...

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    Ultrafast ALD compared to other technologies
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    2812 Downloads

  • High Throughput, Low Cost Deposition Of Alumina

    Vermeer, Ad; SoLayTec, TechnologyRoozeboom, Fred; TNO, Science and Industry; Technical UniversityEindhoven, Applied PhysicsPoodt, Paul; TNO, thin film technologiesGortzen, Roger; SoLayTec, Marketing and Sales Atomic Layer Deposition (ALD) is a gas phase deposition technique for depositing veryhigh quality thin films with an unsurpassed conformality. The main drawback of ALD howeveris the very...

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    High Throughput, Low Cost Deposition Of Alumina
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    6058 Downloads

  • High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells

    Florian Werner, Walter Stals, Roger Görtzen, Boris Veith, Rolf Brendel, Jan Schmidt, Institute for Solar Energy Research Hamelin (ISFH), Am Ohrberg 1, 31860 Emmerthal, Germany SoLayTec, Dillenburgstraat 9G, 5652 AM Eindhoven, The Netherlands High-rate spatial atomic layer deposition (ALD) enables an industrially relevant deposition of high-quality aluminum oxide (Al2O3) films for the surface...

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    High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells
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    6110 Downloads

  • Dutch: Pieken in de Delta: Een snelle machine voor productie zonnecellen

    Ministerie van Economische Zaken, Landbouw en InnovatiePieken in de Delta Zuidoost-NederlandHigh Tech Systemen en Materialen In de wereld van zonne-energie is elke rendementsverbeteringeen kwestie van jarenlang noeste arbeid in het laboratorium.Daarom was het goed nieuws dat de Technische UniversiteitEindhoven een methode voor rendementsverbetering heeftgevonden, door een zeer dunne laag...

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    Dutch: Pieken in de Delta: Een snelle machine voor productie zonnecellen
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    2737 Downloads

  • Surface passivation of si solar cells using industrially relevant deposition techniques

    Jan Schmidt, Florian Werner, Boris Veith, Dimitri Zielke, Robert Bock & Rolf Brendel, Institute for Solar EnergyResearch Hamelin (ISFH), Emmerthal, Germany; Veronica Tiba, SoLayTec, Eindhoven, The Netherlands; Paul Poodt &Fred Roozeboom, TNO Science & Industry, Eindhoven, The Netherlands; Andrew Li & Andres Cuevas, The AustralianNational University (ANU), Canberra, Australia....

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    Surface passivation of si solar cells using industrially relevant deposition techniques
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    8314 Downloads

  • Good things come to those who wait.... Fast ALD Al2O3

    Johannes Bernreuter The growing price pressure in the industry forces crystalline solar cell manufacturers to reach high efficiency levels in production rapidly. The photovoltaic conference in Valencia revealed that some approches which have already been under discussion for years are now increasing in popularity. Source: Sun & Wind Energy, 11/2010

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    Good things come to those who wait.... Fast ALD Al2O3
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    5061 Downloads

  • Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial ALD

    Florian Werner, Boris Veith, Veronica Tiba, Paul Poodt, Fred Roozeboom, Rolf Brendel and Jan Schmidt Using aluminum oxide Al2O3 films deposited by high-rate spatial atomic layer deposition ALD, we achieve very low surface recombination velocities of 6.5 cm/s on p-type and 8.1 cm/s on n-type crystalline silicon wafers. Using spatially separated reaction zones instead of the conventional...

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    Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial ALD
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    4525 Downloads

  • High Speed Atmospheric Pressure ALD For Industrial Scale Solar Cell Passivation

    B. Vermang, A. Rothschild, A. Racz, J. John, J. Poortmans, R. Mertens, P. Poodt, V. Tiba and F. Roozeboom A next generation material for surface passivation is atomic layer deposition (ALD) Al2O3. However, conventional time-resolved ALD is limited by its low deposition rate. Therefore, an experimental high-deposition-rate prototype ALD reactor based on the spatially-separated ALD principle has...

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    High Speed Atmospheric Pressure ALD For Industrial Scale Solar Cell Passivation
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    5864 Downloads

  • Industrially Relevant Al2O3 Deposition Techniques For The Surface Passivation Solar Cells

    Jan Schmidt, Florian Werner, Boris Veith, Dimitri Zielke, Robert Bock, Veronica Tiba, Paul Poodt, Fred Roozeboom, Andrew Li, Andres Cuevas and Rolf Brendel We present independently confirmed efficiencies of 21.4% for PERC cells with plasma-assisted atom-ic-layer-deposited (plasma ALD) Al2O3 rear passivation and 20.7% for cells with thermal ALD-Al2O3. Additionally, we evaluate three different...

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    Industrially Relevant Al2O3 Deposition Techniques For The Surface Passivation Solar Cells
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    4551 Downloads

  • High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

    By Paul Poodt, Adriaan Lankhorst, Fred Roozeboom, Karel Spee, Diederik Maas and Ad VermeerAtomic-layer deposition (ALD) is a deposition technique capable of producing very thin conformal films with control of the thickness and composition of the films at the atomic level.In this Communication we show that with spatially separated ALD of Al2O3 , growth rates of1.2 nm/s can be achieved, showing...

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    High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
    /news/publications/?task=callelement&format=raw&item_id=99&element=aaabb64e-c93a-40ee-a20e-51b448adc334&method=download&args[0]=0
    6174 Downloads

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