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  • SoLayTec, contributes to a better environment

  • SoLayTec, making solar panels more efficient

  • SoLayTec, best performance second generation module

  • SoLayTec, for the ultimate solar cell passivation

OUR PRODUCT

SoLayTec introduces breakthrough techniques. Our distinctiveness is evident in using new technologies such as ‘spatial ALD’ and ‘motion of wafers by the double floating principle’. This enables the best possible passivation for all kind of c-Si solar cells . Furthermore, passivation can be done by a very thin layer at the lowest cost.

Layer thickness flexibility
Modular, Lab to Fab
Up to 4,800 wph

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OUR ADVANTAGES COMPARED TO PECVD

Better efficiency

In a comparison of the two technologies, ALD offered an average gain of 0.2% higher efficiency for PERC compared to the MW-PECVD AIOx.

Higher uptime / output

It’s known that the average uptime of MW-PECVD deposition technique is about 80-85%. The combination of InPassion ALD with SPECTRUM PECVD is about 95%.

Less TMA usage

Due to the fact that the ALD layer is only 5nm thick, and a standard PECVD layer is about 20nm, the saving is about factor 4.

More margin

Savings in TMA consumption along with higher efficiency and output result in a much higher margin for the customer.

OUR CASES

  • SoLayTec integration team

    If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC multi and mono for different customers in Asia on several occasions. A example is the...

    If customers don't have their own R&D team to make PERC process possible, SoLayTec can provide an on-site integration team for successful PERC integration. Our team has integrated PERC...

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  • Jinko Solar, Fandang Jiang

    "ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on mono-Si and 0.6-0.8% efficiency on multi-Si. Also, the uniform thin AlOx layer grown by ALD is useful for...

    "ALD Al2O3 provides excellent passivation to the rear surface of mono-Si and multi-Si solar cells," R&D director Fandang Jiang says. "At Jinko Solar, we can gain 1% efficiency on...

  • Imec Leuven, Jef Poortmans

    "In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform and conformal, the ALD technique is a unique option."

    "In our semiconductor affiliation program at imec we have been using ALD for many years," Program Director PV Jef Poortmans states. "Especially when a certain layer needs to be very dense, uniform...

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  • Hanwha, Frederieke Kersten

    Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."

    Frederieke Kersten states: "Using the ALD compared with our MW-PECVD system creates a higher efficiency and is a promising tool for Al2O3 passivation."

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Al2O3 APPLICATIONS

PERC, IBC, N-PERT

Seff DOWN TO

1 ~ 5 CM/SEC

MODULAR CONCEPT

4, 6 OR 8 MODULES

OUR PUBLICATIONS

  • Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA

    Atomic layer deposited (ALD) AI203 films are not yet applied in the PV industry despite their excellent performance in the lab. A major challenge is the usage of expensive semiconductor (semicon) grade trimethylaluminium (TMA) as the AI precursor. The cost of ownership for ALD AI203 passivation can be significantly reduced if lower purity solar grade TMA is used. Earlier work bij Dingemans et...

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    Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA
    1907 Downloads
  • Ultrafast ALD compared to other technologies

    Roger Görtzen, SoLayTecDillenburgstraat 9G, 5652 AM Eindhoven, The Netherlands What will be the standard for Al2O3? At this moment there are a few options for deposition of Al2O3. Spatial ALD, Batch ALD and, of course, PECVD, currently the most common. This article cannot go into too much detail about every solution but the obvious question to ask is “what will be the standard for Al2O3 for...

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    Ultrafast ALD compared to other technologies
    2800 Downloads

LATEST NEWS

  • SoLayTec launches new product and proves cell efficiency gain of 0,2% compared to PECVD AlOx

    New products of Tempress and SoLayTec were revealed during the last two exhibitions. Especially for the next PERC2.0 expansions those products are...

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  • SoLayTec is making its entrance into the Taiwanese market and confirms strong incoming orders

    SoLayTec today announced the continuing positive trend of incoming orders. Four new solar customers around the globe have ordered the Atomic Layer...

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  • SoLayTec wins repeat and new order for InPassion ALD from two Chinese Tier One solar manufacturers

    The new InPassion ALD user, which is one of the tier one players in China, will start multi cSi PERC development in its in-house R&D centre....

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  • imec, SoLayTec, Tempress and meco achieve Record Efficiency (22%) for Large Area cSi N-PERT

    Leuven (Belgium)—Jan. 15, 2015—Nano-electronics research center imec announced today that it has improved its large area n-type PERT...

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  • InPassion® ALD from SoLayTec to be evaluated by Hanwha Q CELLS

    Germany based Hanwha Q CELLS in Thalheim starts to evaluate the SoLayTec InPassion® ALD “LAB to FAB solution”. This tool will be used for the...

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  • Amtech Systems acquires majority ownership of SoLayTec

    Tempress (a subsidiary of the Amtech Group) has acquired the SoLayTec shares previously owned by RENA GmbH as they will focus on its expertise in...

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  • SoLayTec sells first InPassion® ALD machine in the U.S. market

    US based Mission Solar Energy has ordered an InPassion ALD for its high efficiency n-type silicon bifacial solar cell line. With this order...

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  • Rising orders and shipments for SoLayTec’s InPassion® ALD systems

    In recent weeks SoLayTec has shipped a number of systems. These systems includes a repeat order for modules (approx. 60MW) for an Asian customer,...

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  • imec, meco and SoLayTec Achieve Record Efficiency for Large Area Industrial cSi n-PERT solar cell

    Nano-electronics research center imec, reported today a n-type PERT crystalline silicon (Si) solar cell fabricated on a large area wafer (15.6cm x...

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  • RENA and SoLayTec ship their 10th InPassion® system to a Chinese Tier One PV manufacturer

    In January the combination of RENA and SoLayTec received an order for the turnkey InPERC technology. The customer will convert one of its...

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  • SoLayTec receives repeat Al2O3 order from Chinese Tier One cell manufacturer

    A tier one cell manufacturer has ordered a second RENA-SoLayTec machine to start producing PERC cells in their production base of mono-Si wafers in...

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  • SoLayTec receives prestigious International solar award for its product “InPassion ALD”

    Three years after starting SoLayTec, the company received its first international solar award. This award was presented during the EU PVSEC...

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  • Imec, RENA and SoLayTec improve ALD passivation industrial PERC achieving 20.1%

    Leuven (Belgium) – September 27, 2013At next week’s European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC, Paris), the Belgian...

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  • ISFH and SoLayTec demonstrate 20.1% PERC cell efficiency with spatial ALD Al2O3 rear passivation

    ISFH and SoLayTec have achieved a conversion efficiency of 20.1% applying a 5nm thin spatial ALD Al2O3 layer as rear passivation of industrial-type...

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  • RENA and SoLayTec’s InPERC technology reaches 18% Eff. on mc-Si at a major Chinese cell manufacturer

    - 18% efficiency on multi without selective emitter- InPassion ALD Al2O3 passivation as core technologyRENA’s Inline technology for Passivated...

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  • Smit Ovens and SoLayTec start co-operation on Large Area spatial ALD for Solliance CIGS/CZTS

    Cooperation between technology leaders will accelerate development of cost efficient solution for Large Area ALD in Thin Film PV & Display...

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  • Two new customers select the flexible ALD production machine from SoLayTec

    Last year at the 27th PVSEC in Frankfurt, SoLayTec introduced the InPassion ALD (Atomic Layer Deposition) mass production machine for low cost...

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  • Imec, RENA and SoLayTec present 19,6% high-efficiency i-PERC cell

    EUPVSEC 2012 (Frankfurt, Germany) – September 24, 2012At this week’s European Photovoltaic Solar Energy Conference and Exhibition (27th...

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  • SERIS Orders Lab-to-Fab Tool From SoLayTec

    Eindhoven, The Netherlands, June 25 2012 The Solar Energy Research Institute of Singapore (SERIS) has purchased a Process Development Tool (PDT)...

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  • Extended cooperation of ISFH and SoLayTec

    Eindhoven, The Netherlands, March 21 2012ISFH in Germany has purchased a Process Development Tool from SoLayTec. ISFH will optimize the Al2O3...

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  • SoLayTec wins Dutch Solar Award 2012

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  • RENA Increased Share In SoLayTec 45%

    Eindhoven, The Netherlands, September 12, 2011- RENA is largest shareholder of SoLayTec- Atomic Layer Deposition for high efficiency solar cell...

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  • SoLayTec First Customers PDT

    Eindhoven, The Netherlands, June 28, 2011Imec, Fraunhofer ISE and two Asian cell manufacturers have shown their trust in the ultrafast ALD...

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  • SoLayTec CleanTech Star Award

    Eindhoven, The Netherlands, May 3, 2011 SoLayTec is genomineerd voor de WNF Cleantech Star 2011. Dit is een prijs voor het meest veelbelovende...

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  • Pressrelease: Investors Express Confidence In Ultrafast ALD

    The German wet processing equipment producer RENA GmbH and Brabant Development Agency (BOM) have invested in SoLayTec, a company incorporated by...

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  • 20110214 Pressrelease SoLayTec RENA TNO BOM

    Eindhoven, The Netherlands, February 14, 2011 The German wet processing equipment producer RENA GmbH and Brabant Development Agency (BOM) have...

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