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SoLayTec InPassion ALD datasheet

Leading research institutes recently reported on the superior solar cell passivation properties of thin aluminium oxide layers grown by Atomic Layer Deposition (ALD). Yet, so far no cost-effective production tool has been available for high-volume ALD deposition of Al2O3. Now SoLayTec introduces a breakthrough technique, making this possible by using spatial ALD.

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SoLayTec InPassion ALD datasheet
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