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Most research institutes that are first in class of these new developments need ALD as the right passivation technique. As the research and development requires low volumes, the InPassion LAB is viewed as the best option for this task. This tool enables a wide DOE of experiments to be defined to find the right recipe, layer thickness and so on for the Al2O3 layer. After identifying the right recipe, a pilot production run can be the next phase before transferring the complete new cell to mass production. |