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- Publications
- High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
- Industrially Relevant Al2O3 Deposition Techniques For The Surface Passivation Solar Cells
- High Speed Atmospheric Pressure ALD For Industrial Scale Solar Cell Passivation
- Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial ALD
- Good things come to those who wait.... Fast ALD Al2O3
- Surface passivation of si solar cells using industrially relevant deposition techniques
- Dutch: Pieken in de Delta: Een snelle machine voor productie zonnecellen
- High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells
- High Throughput, Low Cost Deposition Of Alumina
- Ultrafast ALD compared to other technologies
- Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx
- How much rear side polishing is required?
- Impact of the rear surface roughness on Industrial-Type PERC Solar Cells
- In pursuit of the super PERC cell
- In anderhalf jaar van lab naar fab
- The quaranteed cell efficiency increase, could be a fairy tale
- Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA
- Implementation of a multicrystalline ALD-Al2O3 PERC-technology into an industrial pilot production
- Integration of spatial ALD Aluminium Oxide for rear side passivation of p-TypePERC/PERL solar cells
- Firing-stable and blister-free spatial ALD Al2O3/SiNx stack for industrial PERC solar cells
- Post-deposition thermal treatment of ALD Al2O3 for the passivation of P-type PERC solar cells
- Silicon surface passivation Al2O3 films grown by atomic layer deposition using low-cost precursors
- Industrial production of multicrystalline silicon solar cells with efficiencies above 18%
- Influence boron emitter profile Voc and Jsc losses ion implanted n-type PERT with SoLayTec Al2O3
- Spatial ALD of i-ZnO films for applications in the PV industry
- Implementation of an ALD Al2O3 PERC technology into multi and mono cSi
- Large Area N-Type c-SI solar cells featuring rear emitter and efficiency beyond 21%
- PERC is hot. So think smart
- Translating 2nd Generation InPassion ALD into significant financial gains
- Bifacial n-PERT cells with Al2O3 and plated contacts for multi-wire interconnection
- Upgrade of an Industrial Al-BSF solar cell line into PERC using spatial ALD Al2O3
- Al2O3 Passivation for Copper Plated IBC Cells 15.6x15.6 cm2
- Evaluation of Spatial ALD Al2O3 versus PECVD for rear surface passivation of multi cSi solar cells
- Press releases
- 20110214 Pressrelease SoLayTec RENA TNO BOM
- Pressrelease: Investors Express Confidence In Ultrafast ALD
- SoLayTec CleanTech Star Award
- SoLayTec First Customers PDT
- RENA Increased Share In SoLayTec 45%
- SoLayTec wins Dutch Solar Award 2012
- Extended cooperation of ISFH and SoLayTec
- SERIS Orders Lab-to-Fab Tool From SoLayTec
- Imec, RENA and SoLayTec present 19,6% high-efficiency i-PERC cell
- Two new customers select the flexible ALD production machine from SoLayTec
- Smit Ovens and SoLayTec start co-operation on Large Area spatial ALD for Solliance CIGS/CZTS
- RENA and SoLayTec’s InPERC technology reaches 18% Eff. on mc-Si at a major Chinese cell manufacturer
- ISFH and SoLayTec demonstrate 20.1% PERC cell efficiency with spatial ALD Al2O3 rear passivation
- Imec, RENA and SoLayTec improve ALD passivation industrial PERC achieving 20.1%
- SoLayTec receives prestigious International solar award for its product “InPassion ALD”
- SoLayTec receives repeat Al2O3 order from Chinese Tier One cell manufacturer
- RENA and SoLayTec ship their 10th InPassion® system to a Chinese Tier One PV manufacturer
- imec, meco and SoLayTec Achieve Record Efficiency for Large Area Industrial cSi n-PERT solar cell
- Rising orders and shipments for SoLayTec’s InPassion® ALD systems
- SoLayTec sells first InPassion® ALD machine in the U.S. market
- Amtech Systems acquires majority ownership of SoLayTec
- InPassion® ALD from SoLayTec to be evaluated by Hanwha Q CELLS
- imec, SoLayTec, Tempress and meco achieve Record Efficiency (22%) for Large Area cSi N-PERT
- SoLayTec wins repeat and new order for InPassion ALD from two Chinese Tier One solar manufacturers
- SoLayTec is making its entrance into the Taiwanese market and confirms strong incoming orders
- SoLayTec launches new product and proves cell efficiency gain of 0,2% compared to PECVD AlOx
- Large repeat order for 2nd Generation InPassion ALD
- Exhibitions
- Publications
- High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
- Industrially Relevant Al2O3 Deposition Techniques For The Surface Passivation Solar Cells
- High Speed Atmospheric Pressure ALD For Industrial Scale Solar Cell Passivation
- Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial ALD
- Good things come to those who wait.... Fast ALD Al2O3
- Surface passivation of si solar cells using industrially relevant deposition techniques
- Dutch: Pieken in de Delta: Een snelle machine voor productie zonnecellen
- High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells
- High Throughput, Low Cost Deposition Of Alumina
- Ultrafast ALD compared to other technologies
- Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx
- How much rear side polishing is required?
- Impact of the rear surface roughness on Industrial-Type PERC Solar Cells
- In pursuit of the super PERC cell
- In anderhalf jaar van lab naar fab
- The quaranteed cell efficiency increase, could be a fairy tale
- Excellent Surface Passivation of Silicon at Low Cost: ALD Aluminium Oxide from Solar Grade TMA
- Implementation of a multicrystalline ALD-Al2O3 PERC-technology into an industrial pilot production
- Integration of spatial ALD Aluminium Oxide for rear side passivation of p-TypePERC/PERL solar cells
- Firing-stable and blister-free spatial ALD Al2O3/SiNx stack for industrial PERC solar cells
- Post-deposition thermal treatment of ALD Al2O3 for the passivation of P-type PERC solar cells
- Silicon surface passivation Al2O3 films grown by atomic layer deposition using low-cost precursors
- Industrial production of multicrystalline silicon solar cells with efficiencies above 18%
- Influence boron emitter profile Voc and Jsc losses ion implanted n-type PERT with SoLayTec Al2O3
- Spatial ALD of i-ZnO films for applications in the PV industry
- Implementation of an ALD Al2O3 PERC technology into multi and mono cSi
- Large Area N-Type c-SI solar cells featuring rear emitter and efficiency beyond 21%
- PERC is hot. So think smart
- Translating 2nd Generation InPassion ALD into significant financial gains
- Bifacial n-PERT cells with Al2O3 and plated contacts for multi-wire interconnection
- Upgrade of an Industrial Al-BSF solar cell line into PERC using spatial ALD Al2O3
- Al2O3 Passivation for Copper Plated IBC Cells 15.6x15.6 cm2
- Evaluation of Spatial ALD Al2O3 versus PECVD for rear surface passivation of multi cSi solar cells
- Press releases
- 20110214 Pressrelease SoLayTec RENA TNO BOM
- Pressrelease: Investors Express Confidence In Ultrafast ALD
- SoLayTec CleanTech Star Award
- SoLayTec First Customers PDT
- RENA Increased Share In SoLayTec 45%
- SoLayTec wins Dutch Solar Award 2012
- Extended cooperation of ISFH and SoLayTec
- SERIS Orders Lab-to-Fab Tool From SoLayTec
- Imec, RENA and SoLayTec present 19,6% high-efficiency i-PERC cell
- Two new customers select the flexible ALD production machine from SoLayTec
- Smit Ovens and SoLayTec start co-operation on Large Area spatial ALD for Solliance CIGS/CZTS
- RENA and SoLayTec’s InPERC technology reaches 18% Eff. on mc-Si at a major Chinese cell manufacturer
- ISFH and SoLayTec demonstrate 20.1% PERC cell efficiency with spatial ALD Al2O3 rear passivation
- Imec, RENA and SoLayTec improve ALD passivation industrial PERC achieving 20.1%
- SoLayTec receives prestigious International solar award for its product “InPassion ALD”
- SoLayTec receives repeat Al2O3 order from Chinese Tier One cell manufacturer
- RENA and SoLayTec ship their 10th InPassion® system to a Chinese Tier One PV manufacturer
- imec, meco and SoLayTec Achieve Record Efficiency for Large Area Industrial cSi n-PERT solar cell
- Rising orders and shipments for SoLayTec’s InPassion® ALD systems
- SoLayTec sells first InPassion® ALD machine in the U.S. market
- Amtech Systems acquires majority ownership of SoLayTec
- InPassion® ALD from SoLayTec to be evaluated by Hanwha Q CELLS
- imec, SoLayTec, Tempress and meco achieve Record Efficiency (22%) for Large Area cSi N-PERT
- SoLayTec wins repeat and new order for InPassion ALD from two Chinese Tier One solar manufacturers
- SoLayTec is making its entrance into the Taiwanese market and confirms strong incoming orders
- SoLayTec launches new product and proves cell efficiency gain of 0,2% compared to PECVD AlOx
- Large repeat order for 2nd Generation InPassion ALD
- Brochures
- Exhibitions
- Cases
- SoLayTec integration team
- Jinko Solar, Fandang Jiang
- Imec Leuven, Jef Poortmans
- Hanwha, Frederieke Kersten
- Careers
- Contact